TY - JOUR
T1 - Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target
AU - Azina, Clio
AU - Tunca, Bensu
AU - Petruhins, Andrejs
AU - Xin, Binbin
AU - Yildizhan, Melike Mercan
AU - Persson, Per O. A.
AU - Vleugels, Jozef
AU - Lambrinou, Konstantza
AU - Rosen, Johanna
AU - Eklund, Per
N1 - Score=10
PY - 2021/2/25
Y1 - 2021/2/25
N2 - This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 ◦C. Short deposition times yielded 30–40 nm-thick Alcontaining (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C
and intermetallics. At 900 ◦C, the longer depositions led to films that also consisted of solid solution MAX phases.
Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually
leading to solid state diffusion of Al within the carbide, at the highest temperature (900 ◦C) to form the MAX phases.
AB - This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 ◦C. Short deposition times yielded 30–40 nm-thick Alcontaining (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C
and intermetallics. At 900 ◦C, the longer depositions led to films that also consisted of solid solution MAX phases.
Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually
leading to solid state diffusion of Al within the carbide, at the highest temperature (900 ◦C) to form the MAX phases.
KW - Magnetron sputtering
KW - MAX phase solid solution
KW - Compound target
KW - (TiZr)2AlC
UR - https://ecm.sckcen.be/OTCS/llisapi.dll/open/44822108
U2 - 10.1016/j.apsusc.2021.149370
DO - 10.1016/j.apsusc.2021.149370
M3 - Article
SN - 0169-4332
VL - 551
SP - 1
EP - 8
JO - Applied Surface Science
JF - Applied Surface Science
M1 - 149370
ER -