Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target

Clio Azina; Bensu Tunca; Andrejs Petruhins; Binbin Xin; Melike Mercan Yildizhan; Per O. A. Persson; Jozef Vleugels; Konstantza Lambrinou; Johanna Rosen; Per Eklund

doi:10.1016/j.apsusc.2021.149370

Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target

Clio Azina, Bensu Tunca, Andrejs Petruhins, Binbin Xin, Melike Mercan Yildizhan, Per O. A. Persson, Jozef Vleugels, Konstantza Lambrinou, Johanna Rosen, Per Eklund

Research output › peer-review

Abstract

This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 ◦C. Short deposition times yielded 30–40 nm-thick Alcontaining (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 ◦C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 ◦C) to form the MAX phases.

Original language	English
Article number	149370
Pages (from-to)	1-8
Number of pages	8
Journal	Applied Surface Science
Volume	551
DOIs	https://doi.org/10.1016/j.apsusc.2021.149370
State	Published - 25 Feb 2021

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@article{3208da647b294b56b60c11dd64d07733,

title = "Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target",

abstract = "This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 ◦C. Short deposition times yielded 30–40 nm-thick Alcontaining (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 ◦C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 ◦C) to form the MAX phases.",

keywords = "Magnetron sputtering, MAX phase solid solution, Compound target, (TiZr)2AlC",

author = "Clio Azina and Bensu Tunca and Andrejs Petruhins and Binbin Xin and Yildizhan, {Melike Mercan} and Persson, {Per O. A.} and Jozef Vleugels and Konstantza Lambrinou and Johanna Rosen and Per Eklund",

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year = "2021",

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doi = "10.1016/j.apsusc.2021.149370",

language = "English",

volume = "551",

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journal = "Applied Surface Science",

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T1 - Deposition of MAX phase-containing thin films from a (Ti,Zr)2AlC compound target

AU - Azina, Clio

AU - Tunca, Bensu

AU - Petruhins, Andrejs

AU - Xin, Binbin

AU - Yildizhan, Melike Mercan

AU - Persson, Per O. A.

AU - Vleugels, Jozef

AU - Lambrinou, Konstantza

AU - Rosen, Johanna

AU - Eklund, Per

N1 - Score=10

PY - 2021/2/25

Y1 - 2021/2/25

N2 - This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 ◦C. Short deposition times yielded 30–40 nm-thick Alcontaining (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 ◦C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 ◦C) to form the MAX phases.

AB - This work reports on sputter depositions carried out from a compound (Ti,Zr)2AlC target on Al2O3(0 0 0 1) substrates at temperatures ranging between 500 and 900 ◦C. Short deposition times yielded 30–40 nm-thick Alcontaining (Ti,Zr)C films, whereas longer depositions yielded thicker films up to 90 nm which contained (Ti,Zr)C and intermetallics. At 900 ◦C, the longer depositions led to films that also consisted of solid solution MAX phases. Detailed transmission electron microscopy showed that both (Ti,Zr)2AlC and (Ti,Zr)3AlC2 solid solution MAX phases were formed. Moreover, this work discusses the growth mechanism of the thicker films, which started with the formation of the mixed (Ti,Zr)C carbide, followed by the nucleation and growth of aluminides, eventually leading to solid state diffusion of Al within the carbide, at the highest temperature (900 ◦C) to form the MAX phases.

KW - Magnetron sputtering

KW - MAX phase solid solution

KW - Compound target

KW - (TiZr)2AlC

UR - https://ecm.sckcen.be/OTCS/llisapi.dll/open/44822108

U2 - 10.1016/j.apsusc.2021.149370

DO - 10.1016/j.apsusc.2021.149370

M3 - Article

SN - 0169-4332

VL - 551

SP - 1

EP - 8

JO - Applied Surface Science

JF - Applied Surface Science

M1 - 149370

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