A microdosimetric characterization of the 62 MeV proton beam line of CATANA has been performed all along the Spread Out Bragg Peak with three different detectors. Two silicon detectors and a Tissue Equivalent Proportional Counter measured at approximately the same depths of the SOBP. The TEPC is a new miniaturized gas counter developed at the Legnaro National Laboratories of INFN, modified to work without gas flow. The first silicon detector has been developed at the Politecnico of Milano and it is a monolithic telescope composed by a matrix of 2 μm thick cylindrical diodes with a diameter 9 μm. that compose the ΔE layer. The E and ΔE layers are fabricated on a single substrate of silicon. The third detector is the MicroPlus probe developed at the CMRP - University of Wollongong, it is an array of 3D sensitive volumes each with dimension 30x30 μm and 10 μm thick fabricated on SOI. Measurements performed with the three detectors are presented and discussed.