Abstract
Silicon carbide (SiC) radiation detectors were realized by 10B implantation into the metal contact in order to avoid implantation-related defects within the sensitive area of the 4H-SiC pn junction. No post implantation annealing was performed. Such detectors respond to thermal neutrons showing consistent counting rates as function of external reverse bias voltages and radiation intensity.
Original language | English |
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Title of host publication | Materials Science Forum Vols. 778-780, doi:10.4028/www.scientific.net/MSF.778-780.1046 |
Place of Publication | Zürich, Switzerland |
Pages | 1046-1049 |
State | Published - Feb 2014 |
Event | International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013) - JAEA, AIST, CRIEPI, Miyazaki Duration: 29 Sep 2013 → 4 Oct 2013 |
Conference
Conference | International Conference on Silicon Carbide and Related Materials 2013 (ICSCRM2013) |
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Country/Territory | Japan |
City | Miyazaki |
Period | 2013-09-29 → 2013-10-04 |