Reliability studies of micro-optical components in NEMO

F. Berghmans; M. Van Uffelen; S. Eve; E. Ernst; A. Last; D. Rabus; N. Huber; O. Kraft; A. Andrei; L. Nieradko; K. Krupa; M. Jozwik; C. Gorecki; L. Hirsinger; P. Delobelle; Pawel Kniazewski; L. Salbut; Malgorzata Kujawinska

doi:10.1117/12.662001

Reliability studies of micro-optical components in NEMO

F. Berghmans, M. Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, Pawel Kniazewski, L. Salbut, Malgorzata Kujawinska

Research output › peer-review

Abstract

We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

Original language	English
Title of host publication	Reliability of Optical Fiber Components, Devices, Systems, and Networks III
Place of Publication	Beelingham, Washington, United States
Pages	1-11
Number of pages	11
Volume	6193
DOIs	https://doi.org/10.1117/12.662001
State	Published - May 2006
Event	2006 - SPIE Photonics Europe: Photonic Crystal Materials and Devices III (i.e. V) - SPIE Europe, Strasbourg Duration: 3 Apr 2006 → 6 Apr 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6193
ISSN (Print)	0277-786X

Conference

Conference	2006 - SPIE Photonics Europe
Country/Territory	France
City	Strasbourg
Period	2006-04-03 → 2006-04-06

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.662001License: Unspecified

Cite this

Berghmans, F., Van Uffelen, M., Eve, S., Ernst, E., Last, A., Rabus, D., Huber, N., Kraft, O., Andrei, A., Nieradko, L., Krupa, K., Jozwik, M., Gorecki, C., Hirsinger, L., Delobelle, P., Kniazewski, P., Salbut, L., & Kujawinska, M. (2006). Reliability studies of micro-optical components in NEMO. In Reliability of Optical Fiber Components, Devices, Systems, and Networks III (Vol. 6193, pp. 1-11). Article 61930A (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6193).. https://doi.org/10.1117/12.662001

@inproceedings{dd76ff3c8c3e4c41ad44d391bec158cb,

title = "Reliability studies of micro-optical components in NEMO",

abstract = "We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics {"}NEMO{"}. We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.",

keywords = "Fatigue, Interferometer, MEMS, Metal film, Micro-optic, Optical fibre, Polymer, Radiation, Refractive index, Reliability",

author = "F. Berghmans and {Van Uffelen}, M. and S. Eve and E. Ernst and A. Last and D. Rabus and N. Huber and O. Kraft and A. Andrei and L. Nieradko and K. Krupa and M. Jozwik and C. Gorecki and L. Hirsinger and P. Delobelle and Pawel Kniazewski and L. Salbut and Malgorzata Kujawinska",

note = "Score = 1; 2006 - SPIE Photonics Europe : Photonic Crystal Materials and Devices III (i.e. V) ; Conference date: 03-04-2006 Through 06-04-2006",

year = "2006",

month = may,

doi = "10.1117/12.662001",

language = "English",

isbn = "0819462497",

volume = "6193",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

pages = "1--11",

booktitle = "Reliability of Optical Fiber Components, Devices, Systems, and Networks III",

}

Berghmans, F , Van Uffelen, M, Eve, S, Ernst, E, Last, A, Rabus, D, Huber, N, Kraft, O, Andrei, A, Nieradko, L, Krupa, K, Jozwik, M, Gorecki, C, Hirsinger, L, Delobelle, P, Kniazewski, P, Salbut, L & Kujawinska, M 2006, Reliability studies of micro-optical components in NEMO. in Reliability of Optical Fiber Components, Devices, Systems, and Networks III. vol. 6193, 61930A, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6193, Beelingham, Washington, United States, pp. 1-11, 2006 - SPIE Photonics Europe, Strasbourg, France, 2006-04-03. https://doi.org/10.1117/12.662001

TY - GEN

T1 - Reliability studies of micro-optical components in NEMO

AU - Berghmans, F.

AU - Van Uffelen, M.

AU - Eve, S.

AU - Ernst, E.

AU - Last, A.

AU - Rabus, D.

AU - Huber, N.

AU - Kraft, O.

AU - Andrei, A.

AU - Nieradko, L.

AU - Krupa, K.

AU - Jozwik, M.

AU - Gorecki, C.

AU - Hirsinger, L.

AU - Delobelle, P.

AU - Kniazewski, Pawel

AU - Salbut, L.

AU - Kujawinska, Malgorzata

N1 - Score = 1

PY - 2006/5

Y1 - 2006/5

N2 - We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

AB - We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

KW - Fatigue

KW - Interferometer

KW - MEMS

KW - Metal film

KW - Micro-optic

KW - Optical fibre

KW - Polymer

KW - Radiation

KW - Refractive index

KW - Reliability

UR - http://ecm.sckcen.be/OTCS/llisapi.dll/open/ezp_32074

U2 - 10.1117/12.662001

DO - 10.1117/12.662001

M3 - In-proceedings paper

SN - 0819462497

SN - 9780819462497

VL - 6193

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 1

EP - 11

BT - Reliability of Optical Fiber Components, Devices, Systems, and Networks III

CY - Beelingham, Washington, United States

T2 - 2006 - SPIE Photonics Europe

Y2 - 3 April 2006 through 6 April 2006

ER -

Berghmans F , Van Uffelen M, Eve S, Ernst E, Last A, Rabus D et al. Reliability studies of micro-optical components in NEMO. In Reliability of Optical Fiber Components, Devices, Systems, and Networks III. Vol. 6193. Beelingham, Washington, United States. 2006. p. 1-11. 61930A. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.662001