Reliability studies of micro-optical components in NEMO

Francis Berghmans; Marco Van Uffelen; S. Eve; E. Ernst; A. Last; D. Rabus; N. Huber; O. Kraft; A. Andrei; L. Nieradko; K. Krupa; M. Jozwik; C. Gorecki; L. Hirsinger; P. Delobelle; P. Kniazewski; L. Salbut; M. Kujawinska; Pierre D'hondt

Reliability studies of micro-optical components in NEMO

Francis Berghmans, Marco Van Uffelen, S. Eve, E. Ernst, A. Last, D. Rabus, N. Huber, O. Kraft, A. Andrei, L. Nieradko, K. Krupa, M. Jozwik, C. Gorecki, L. Hirsinger, P. Delobelle, P. Kniazewski, L. Salbut, M. Kujawinska, Pierre D'hondt

Research output › peer-review

Abstract

We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

Original language	English
Title of host publication	Proceedings of SPIE on CD-rom: Photonics Europe 2006
Place of Publication	Beelingham, Washington, United States
Pages	1-11
Volume	6193
State	Published - Apr 2006
Event	Potonics Europe - SPIE Europe, Strasbourg Duration: 3 Apr 2006 → 7 Apr 2006

Conference

Conference	Potonics Europe
Country/Territory	France
City	Strasbourg
Period	2006-04-03 → 2006-04-07

Cite this

Berghmans, F., Van Uffelen, M., Eve, S., Ernst, E., Last, A., Rabus, D., Huber, N., Kraft, O., Andrei, A., Nieradko, L., Krupa, K., Jozwik, M., Gorecki, C., Hirsinger, L., Delobelle, P., Kniazewski, P., Salbut, L., Kujawinska, M., & D'hondt, P. (2006). Reliability studies of micro-optical components in NEMO. In Proceedings of SPIE on CD-rom: Photonics Europe 2006 (Vol. 6193, pp. 1-11).

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title = "Reliability studies of micro-optical components in NEMO",

abstract = "We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics {"}NEMO{"}. We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.",

keywords = "micro-optic, reliability, fatigue, metal film, polymer, MEMS, interferometer, refractive index, optical fibre, radiation",

author = "Francis Berghmans and {Van Uffelen}, Marco and S. Eve and E. Ernst and A. Last and D. Rabus and N. Huber and O. Kraft and A. Andrei and L. Nieradko and K. Krupa and M. Jozwik and C. Gorecki and L. Hirsinger and P. Delobelle and P. Kniazewski and L. Salbut and M. Kujawinska and Pierre D'hondt",

note = "Score = 1; Potonics Europe ; Conference date: 03-04-2006 Through 07-04-2006",

year = "2006",

month = apr,

language = "English",

volume = "6193",

pages = "1--11",

booktitle = "Proceedings of SPIE on CD-rom: Photonics Europe 2006",

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Berghmans, F, Van Uffelen, M, Eve, S, Ernst, E, Last, A, Rabus, D, Huber, N, Kraft, O, Andrei, A, Nieradko, L, Krupa, K, Jozwik, M, Gorecki, C, Hirsinger, L, Delobelle, P, Kniazewski, P, Salbut, L, Kujawinska, M & D'hondt, P 2006, Reliability studies of micro-optical components in NEMO. in Proceedings of SPIE on CD-rom: Photonics Europe 2006. vol. 6193, Beelingham, Washington, United States, pp. 1-11, Potonics Europe, Strasbourg, France, 2006-04-03.

TY - GEN

T1 - Reliability studies of micro-optical components in NEMO

AU - Berghmans, Francis

AU - Van Uffelen, Marco

AU - Eve, S.

AU - Ernst, E.

AU - Last, A.

AU - Rabus, D.

AU - Huber, N.

AU - Kraft, O.

AU - Andrei, A.

AU - Nieradko, L.

AU - Krupa, K.

AU - Jozwik, M.

AU - Gorecki, C.

AU - Hirsinger, L.

AU - Delobelle, P.

AU - Kniazewski, P.

AU - Salbut, L.

AU - Kujawinska, M.

A2 - D'hondt, Pierre

N1 - Score = 1

PY - 2006/4

Y1 - 2006/4

N2 - We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

AB - We discuss on-going reliability studies of micro-optical components and assemblies as conducted in the EU FP6 Network of Excellence on Micro-Optics "NEMO". We focus on three case studies including first biaxial fatigue testing of micro-optical components, second reliability testing and quality control of MEMS and third micro-interferometric tomography for measuring optical fibre refractive index changes. For each of these case studies we discuss the dedicated measurement and characterization methods as well as first results and the perspectives for future research.

KW - micro-optic

KW - reliability

KW - fatigue

KW - metal film

KW - polymer

KW - MEMS

KW - interferometer

KW - refractive index

KW - optical fibre

KW - radiation

UR - http://ecm.sckcen.be/OTCS/llisapi.dll/open/ezp_32074

UR - http://knowledgecentre.sckcen.be/so2/bibref/3600

M3 - In-proceedings paper

VL - 6193

SP - 1

EP - 11

BT - Proceedings of SPIE on CD-rom: Photonics Europe 2006

CY - Beelingham, Washington, United States

T2 - Potonics Europe

Y2 - 3 April 2006 through 7 April 2006

ER -